真空渗氮是使用真空炉对钢铁零件进行整体加热、充入少量气体，在低压状态下产生活性氮原子渗入并向钢中扩散而实现硬化的；而离子渗氮是靠晖光放电产生的活性N离子轰击并仅加热钢铁零件表面，发生化学反应生成核化物实现硬化的。真空渗氛时，将真空炉排气至较高真空度0.133Pa（1×10-3Torr）后，将工件升至，530～560℃，同时送入以氨气为主的，含有活性物质的多种复合气体，并对各种气体的送入量进行精确控制，炉压控制在0.667Pa（5Torr），保温3～5h后，用炉内惰性气体进行快速冷却。不同的材质，经此处理后可得到渗层深为20～80μm、硬度为600～1500HV的硬化层。
Vacuum nitriding is to use vacuum furnace to heat iron and steel parts as a whole, fill a small amount of gas, produce living nitrogen atoms in the low-pressure state to infiltrate and diffuse into the steel to achieve hardening; while ion nitriding is to rely on the active N ions produced by the glow discharge to bombard and only heat the surface of iron and steel parts, and generate nuclear compounds to achieve hardening. During vacuum infiltration, exhaust the vacuum furnace to a higher vacuum degree of 0.133Pa (1 × 10-3torr), raise the workpiece to 530-560 ℃, and simultaneously send a variety of compound gases containing active substances, mainly ammonia gas, and accurately control the amount of various gases. The furnace pressure is controlled at 0.667pa (5torr). After holding for 3-5h, use inert gas in the furnace for rapid cooling. The hardened layer with the depth of 20-80 μ m and the hardness of 600-1500 HV can be obtained by using different materials.